PRODUCT

GenUV is the total solution specialist in UV detection technology over 20 years.

  • PRODUCT
  • Epi Service2
  • AlN Template
Image Series Name Part Number Size (mm3) Spec.Sheet Manual
product Epi Wafer AlN 2" (50.8㎜)

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제품 설명

- Thickness (Included substrate): 430㎛±15㎛
- Structure: AlN / Sapphire substrate
- Thickness (Included substrate): 430㎛±15㎛

Specifications

Characteristics (at 25℃)

Parameter Typ. Test Conditions
Crack Free AlN Surface
Area		 Diameter >44mm  
Thickness Thickness <3㎛
XRD (002) <250 arcsec Panalytical
HRXRD
(102) <400 arcsec
RMS 5 ㎛ * 5 ㎛ 1 nm  

 

Technical inquiry : joocheol@geni-uv.com / Jeong Joo-cheol / Manager