| Image | Series Name | Part Number | Size (mm3) | Spec.Sheet | Manual |
|---|---|---|---|---|---|
|
Epi Wafer | AlN | 2" (50.8㎜) |
Down |
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제품 설명
- Thickness (Included substrate): 430㎛±15㎛
- Structure: AlN / Sapphire substrate
- Thickness (Included substrate): 430㎛±15㎛
- Specifications
-
Characteristics (at 25℃)
Parameter Typ. Test Conditions Crack Free AlN Surface
AreaDiameter >44mm Thickness Thickness <3㎛ XRD (002) <250 arcsec Panalytical
HRXRD(102) <400 arcsec RMS 5 ㎛ * 5 ㎛ 1 nm Technical inquiry : joocheol@geni-uv.com / Jeong Joo-cheol / Manager